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HIGH-K SOLUTION full report
#1


.ppt   HIGH-K SOLUTION.ppt (Size: 561 KB / Downloads: 145)

HIGH-K SOLUTION


INTRODUCTION
MOORE™™S LAW

A prediction made by Mr. Gordon Moore
that the number of transistors on a chip double every two years.


RUNNING OUT OF ATOMS

Transistor physical gate length reached 1.2nm in 90nm logic technology.
At this point the dielectric has became
so thin,we are literally running out of atoms for further scaling


WHAT ARE HIGH-K

MATERIALS
Thicker class of material known as High-K is likely to replace Silicon oxide.
K stands for dielectric constant, a measure of how much charge a material can hold.


ALTERNATE HIGH K MATERIALS

Aluminium oxide
Titanium dioxide
Tantalum pentoxide
Hafnium dioxide
Hafnium silicate
Zirconium oxide
Zirconium silicate

Problem Associated with Dielectric Layer Formation
Trapped Charge Problem -as a result there will be shift in threshold voltage each time the transistor is turned on.

GATE ELECTRODE
PROBLEMS WHEN SiO2 IS REPLACED WITH HIGH-K

Problems arise due to interaction with the Poly-Si gate
Low carrier mobility “electrons slow down


Metal Gate

Using a Metal Gate instead of Polysilicon.
The key property- Work Function of metal.
Tungsten and Molybdenum

Fabrication Methods
Gate First

-Gate dielectrics and gate electrodes are constructed first.
-Source and Drain are constructed next.
-Annealing
-Gate Electrode should withstand the high temperature.
Gate Last
-Gate is constructed after the source and drain are formed.
-Research is going on to find the material with right work function that could survive high temperature and enable the industry standard gate first process flow.

Summary

With the High K/Metal Gate Transistor it is possible to develop 45 nm technology node.
This will drive Moore's Law into next decade.
Reply
#2
this is my work on high k solution used in micro processors which is the next generation technology


Attached Files
.ppt   HIGH-K SOLUTION.ppt (Size: 563 KB / Downloads: 27)
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#3

to get information about the topic"HIGH-K SOLUTION full report"refer the link bellow

https://seminarsprojects.net/Thread-high...8#pid57898
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#5
The term high-κ dielectric refers to a material with a high dielectric constant κ (as compared to silicon dioxide). High-κ dielectrics are used in semiconductor manufacturing processes where they are usually used to replace a silicon dioxide gate dielectric or another dielectric layer of a device. The implementation of high-κ gate dielectrics is one of several strategies developed to allow further miniaturization of microelectronic components, colloquially referred to as extending Moore's Law.
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